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Item

National standard
GB/T18867-2014

Sulfur hexafluoride(SF6) (volume fraction) /10-2         ≥

99.999

(Oxygen+argon) (O2+Ar) content (volume fraction) /10-6        ≤

2.0

Nitrogen (N2) content (volume fraction) /10-6            ≤

2.0

Carbon tetrafluoride(CF4) (volume fraction) /10-6         ≤

1.0

Carbon monoxide (CO) (volume fraction) /10-6         ≤

0.5

Carbon dioxide (CO2) (volume fraction) /10-6         ≤

0.5

Methane (CH4)  (volume fraction) /10-6         ≤

0.5

Moisture (H2O) (volume fraction) /10-6               ≤

3.0

Mass fraction of acidity (HF) /10-6         ≤

0.1

Mass fraction of hydrolyzable fluoride (HF) /10-6   ≤

0.8

Comprehensive volume fraction of impurities/10-6                ≤

10

Particle

Negotiable