?????: +86-599-6655932
?????: +86-599-6654866
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????
?????? ????????
|
???? |
???? |
|
??? ????????(SF6)??（????）/10-2 ≥ |
99.999 |
|
（??+???）（O2+Ar）（????）/10-6 ≤ |
2.0 |
|
??（N2）（????）/10-6 ≤ |
2.0 |
|
??? ?????????(CF4) （????）/10-6 ≤ |
1.0 |
|
???????（CO）（????）/10-6 ≤ |
0.5 |
|
???????（CO2）（????）/10-6 ≤ |
0.5 |
|
??(CH4) （????）/10-6 ≤ |
0.5 |
|
??(H2O) （????）/10-6 ≤ |
3.0 |
|
??（HF? ??）????/10-6 ≤ |
0.1 |
|
?? ??? ??（HF? ??）? ????/10-6 ≤ |
0.8 |
|
?????（????）/10-6 ≤ |
10 |
|
?? |
?? ??? ???? |