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Electronic grade anhydrous hydrogen fluoride
No. |
Item |
Unit |
Specifications |
|
1 |
Hydrofluoric acid |
HF |
wt% |
≥99.999 |
2 |
Chloride |
Cl |
ppb |
≤100 |
3 |
Nitrate |
NO3 |
ppb |
≤100 |
4 |
Phosphate |
PO4 |
ppb |
≤100 |
5 |
Sulfate |
SO4 |
ppb |
≤100 |
6 |
Silicon |
Si |
ppb |
≤100 |
7 |
Iron |
Fe |
ppb |
≤50 |
8 |
Nickel |
Ni |
ppb |
≤50 |
9 |
Chromium |
Cr |
ppb |
≤50 |
10 |
Copper |
Cu |
ppb |
≤50 |
11 |
Sodium |
Na |
ppb |
≤50 |
12 |
Calcium |
Ca |
ppb |
≤50 |