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Octafluoropropane
Molecular Formula:C3F8
Molecular Weight: 188
|
Ingredient
|
Content |
Unit |
|
C3F8 |
≥99.99 |
%V |
|
Air |
≤30 |
ppmv |
|
CO2 |
≤2 |
ppmv |
|
H2O |
≤10 |
ppmv |
|
Other Halocarbon |
≤50 |
ppmv |
|
Acidity (HF) |
≤0.1 |
ppmw |
Performance and Property:
Colorless and non-flammable gas with low toxic
Uses:
Plasma etching material and etc
Storage:
In ventilated and cool non-flammable gas special used warehouse and keep away from fire and heat resource
Transportation:
Meet related regulation
Packing:
In special treated clean, dry gas cylinde and the volume is 40L, 12.5L, 10L, 8L and 4L or according to requirements